VICTORY Process
3D PROCESS SIMULATOR
VICTORY Process is a general purpose 3D process simulator. VICTORY Process includes a complete process flow core simulator and three advanced simulation modules: Monte Carlo Implant, Advanced Diffusion and Oxidation, and Physical Etch and Deposit. Proprietary models, as well as public domain research models, can be easily integrated into VICTORY Process using the open modeling interface.
Key Features
Sophisticated multi-particle flux models for physical deposition and etching with substrate material redeposition
Extremely accurate and fast Monte Carlo implant simulation
Comprehensive set of 3D diffusion models: Fermi, three-stream, and five-stream
3D physical oxidation simulation with stress analysis
Fast 3D structure prototyping capability enables the in-depth physical analysis of specific processing issues
Accurately predicts 3D topology and 3D dopant distribution
Automatic meshing and Adaptive Mesh Refinement
Efficient multi-threading of time critical operations of Monte Carlo implantation, diffusion, oxidation, and physical etching and deposition
Open architecture allows easy introduction and modification of customer specific physical models
Seamless link to 3D device simulators including structure mirroring, adaptive doping refinement and electrode specification
Silvaco\’s strong encryption is available to protect valuable customer and third party intellectual property.
Core Process Simulator
VICTORY Process Core Simulator provides a convenient platform for fast simulation of all important process steps in 3D.
Fast Geometrical Etch and Deposition
Idealized isotropic etching
Idealized conformal deposition
Selective etching or complete removal of material regions
Idealized full structure or selective material planarization
Mask pattern with tilted sidewalls or rounded corners
Mask pattern transfer by vertical or dry etching
Mask pattern transfer of aerial images
Mask polygon definition within the input deck
Supports mask feature variations (shrink and expand)
Supports GDSII and MaskViews mask formats
VICTORY Cell
3D PROCESS SIMULATOR FOR LARGE STRUCTURES
VICTORY Cell is a fast, layout-driven 3D process simulator specifically designed for large structures. Simulation speed is derived from careful selection of process models suitable for devices such as CMOS image sensors, TFT arrays, power devices, and other large geometry structures.
Key Features
Fast 3D process-modeling of etch, deposition, implantation, and diffusion
GDSII layout-driven
Accurate and fully multi-threaded 3D Monte Carlo implantation
Mesh algorithms optimized for large device structures
Automated layout-driven mesh generation
User-controlled mesh placement
Easy to learn and user-friendly SUPREM-like syntax
Interface to 3D Device simulators ATLAS 3D and VICTORY Device
Silvaco\’s strong encryption is available to protect valuable customer and third party intellectual property.
Product:Silvaco TCAD 2012.3 for win
Lanaguage:english
Platform:WIN32&WIN64
Size:1CD